Micro-ring resonantors fabricated by focused-ion-beam on SOI

摘要：

We present the fabrication of the micro-ring resonators on SOI substrate by directly focused-ion-beam (FIB) milling. Micro-ring resonators with diameters of 10 μm and 80 μm are fabricated and their corresponding intrinsic Q factors are 1,400 and 7,400, respectively.

关键词： Focused-ion-beam ring resonators

作者: Jie Tian Min Qiu

作者单位: Department of Microelectronics and Applied Physics,Royal Institute of Technology,Electrum 229,16440,Kista,Sweden

会议类型: 国际会议

会议名称: 2008亚太光通信会议(Asia-Pacific Optical Communications 2008)

会议地点: 杭州

会议语种:英文

在线出版日期: 2008-10-26（万方平台首次上网日期，不代表论文的发表时间）