Design and simulation of a nano-scale micro positioning stage

摘要：

Micro positioning stage is a commonly used platform for MEMS.In this paper,we present a new micro positioning stage including its design,simulation and optimization.The new micro positioning stage is made of four sets of two leaf springs.The geometric dimensions are determined by optimization.Its performance,including the stress and displacement,is evaluated using Finite Element Analysis by ANSYS.The simulation results indicated that the new design can achieve nano position accuracy reliably.

关键词： micro positioning stage leaf springs system identification simulation optimization

作者: Xie Xiaohui Du Ruxu Sun Qiang

作者单位: Shenzhen Institute of Advanced Integration Technology,Chinese Academy of Sciences/The Chinese University of Hong Kong,China

会议类型: 国际会议

会议名称: International Conference on Modelling,Identification and Control(模拟、鉴定、控制国际会议)

会议地点: 上海

会议语种:英文

在线出版日期: 2008-06-29（万方平台首次上网日期，不代表论文的发表时间）