Design and fabricating of visible/infrared dual-band microfilter array
Integrated visible/infrared dual-band filter array is the key component of compact, lightweight, rigid miniature dual-band CCD sensing system. Interference cut-off filter array and interference absorbing filter array have been designed for infrared and visible pass band respectively. A simple, effective and compatible with high temperature deposition process lift-off technique for striping thick infrared film was investigated. Integrating photolithography, ion beam assisted electron beam physical vapor deposition and improved lift-off process, dual-band microfilter array with good performance was fabricated on the same sapphire substrate consecutively. Details of design and fabricating procedure are elucidated, and experimental results are presented.
microfilter array lift-off interference filter PtSi CCD
Huafeng Liang Jianjun Lai Zhiping Zhou Li Li
Wuhan National Laboratory for Optoelectronics,Wuhan,Hubei,P.R.China,430074;College of Optoelectronic Wuhan National Laboratory for Optoelectronics,Wuhan,Hubei,P.R.China,430074; Chongqing Optoelectronics Research Institute,Chongqing,P.R.China,400060
国际会议
2008亚太光通信会议(Asia-Pacific Optical Communications 2008)
杭州
英文
2008-10-26（万方平台首次上网日期，不代表论文的发表时间）