High-power microwave discharge for producing large-area surface-wave plasmas

摘要：

The theory of surface-wave discharge is introduced.A novel structure of the slot antenna array is designed in this paper,and its excitation is numerical analyzed using dipole-antenna array model and FDTD method,respectively.A microwave discharge experiment is operated with this slot-antenna array,and a numerical simulation is also done with FDTD code using the parameter of plasma from experimental measurement.It is found that the designed slot antenna array can excite effectively the microwave coupling into the cavity,and produce the stable large-area high-density plasma.

作者: Chen Zhaoquan Liu Minghai Chen Wei Luo Zhiqing Tang Liang Lan Chaohui Hu Xiwei

作者单位: Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education,College of Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education,College of

会议类型: 国际会议

会议名称: 第八届电磁理论、天线及传播国际研讨会

会议地点: 昆明

会议语种:英文

在线出版日期: 2008-11-01（万方平台首次上网日期，不代表论文的发表时间）