Prediction of Signal Transfer Characteristics of Probe Card Using Electro-Magnetic Solvers
Probe card is an interface to test the operation of fabricated semiconductor wafer.It connects the test /measurement device to semiconductor wafer by redistributing thousands of signal routes in an appropriate way.In this paper,we measure and simulate the high-frequency transfer characteristics of a MEMs type Probe Card.By comparison of the simulated and measured data,it is confirmed that Electro-Magnetic Solvers (HFSS,SIwave,and Nexxim for integration) are reliable to predict the high frequency signal transfer characteristics of the complicated MEMs probe card.Also,it was found that the major signal attenuation occurred at the tip and PCB in the Probe Card,especially in high-frequency range.
Hak-jun Kim Jin-keon Yu Jongmin Kim Jung-bea Oh Hyung-do Lim Wansoo Nah
School of Information and Communication Engineering,Sungkyunkwan University300 Chenchen Dong,Jangan SECRON CO.,LTD 4-4 Chaam Dong Cheonan City Chungnam,Korea 330-200 School of Information and Communication Engineering,Sungkyunkwan University 300 Chenchen Dong,Jangan
国际会议
昆明
英文
2008-11-01（万方平台首次上网日期，不代表论文的发表时间）