RF MEMS and its Applications in Microwaves and Millimeter Waves

摘要：

RF MEMS devices utilized micromachiningtechnologies offer a high performance to several RFapplications.They receive increasingly attentions inmicrowave researchers and Engineers in the recent years.Thispaper includes two parts.In the first part,a brief review of RFMEMS is presented.In the second part,some research work ofthe authors group on RF MEMS technology is introduced.

作者: Shouzheng Zhu

作者单位: Dept.of EE.,East China Normal University,Shanghai,200062,China

会议类型: 国际会议

会议名称: 2008 China-Japan Joint Microwave Conference(2008年中日微波会议)

会议地点: 上海

会议语种:英文

页码: 407-410

在线出版日期: 2008-09-10（万方平台首次上网日期，不代表论文的发表时间）