Micro-cantilever Array and its Application in Gas Sensor
Micro-cantilever array was made by micromachining technology. Its mechanical characteristic was analyzed.A gas sensor based micro-cantilever array was presented. The different material sensing layers were fabricated on the different micro-cantilever surface respectively; the physical or chemical absorption alters the mass of micro-cantilever,accordingly,the mechanical characteristic of micro-cantilever was changed. The vibration characteristics of beam array and its changes were measured by optoelectronic means. The component of mixed gas was identified by neural network and pattern recognition technologies. The micro-cantilever array gas sensor was examined by using ethanol (C2HsOH),natural gas and butane (C4H10). The experiment results of the gas sensor were obtained.
Wu Pan Ning Li
College of Optoelectronics Engineering,Chongqing University of Posts and Telecommunications Chongqing 400065,P.R.China
国际会议
2008 International Conference on Microwave and Millimeter Wave Technology(2008国际微波毫米波技术会议)
南京
英文
1547-1550
2008-04-21（万方平台首次上网日期，不代表论文的发表时间）