Determining of Youngs Modulus of Multi-layered Structure by SAWs Method
(0) The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derivedIn This study. The dispersion features of SAWs propagating on the example TiO2/TiN duplex film coated on titanium ahoy are investigated to instruct an accurate and facile fitting process for determining Youngs modulus of TiO2/TiN duplex film. The dependence of dispersion relation on the elastic modulus of TiO2 and TiN as web as frequency are provided and discussedIndetail. The study shows an obvious influence of multi-layered structure on the dispersion relation of SAWs. Numerical result shows that the dispersion curve is well separated. It confirms that the SAWs technique has high resolution on determining Youngs modulus of multilayered structure.
Xia Xiao Xue-Yi You
School of Electronic and Information Engineering,Tianjin University,300072 Tianjin,China School of Environmental Science and Engineering,Tianjin University,300072 Tianjin,China
国际会议
2008 International Conference on Microwave and Millimeter Wave Technology(2008国际微波毫米波技术会议)
南京
英文
641-644
2008-04-21（万方平台首次上网日期，不代表论文的发表时间）