A Patterning Technique For Superconducting MgB2 Films

摘要：

The precursor boron films were prepared by chemical vapor deposition by using diborane as the boron source,and patterned by using H2O2 solution as the etchant. The films then annealed in Mg vapor in a tantalum crucible. The patterned MgB2 films with high resolution has a transition temperature of 37 K and a critical current density of 1×106 A/cm2.

关键词： patterning superconducting films Magnesium diboride CVD lithography

作者: Fashun Yang Zhangyu Zhou Zhao Ding Xinghua Fu

作者单位: Department of electronics,Guizhou University,North Campus at Huaxi,Guiyang 550025,E R.China Key Laboratory of Micro-Nano Technology of Guizhou Province

会议类型: 国际会议

会议名称: 2008 International Conference on Microwave and Millimeter Wave Technology(2008国际微波毫米波技术会议)

会议地点: 南京

会议语种:英文

页码: 595-596

在线出版日期: 2008-04-21（万方平台首次上网日期，不代表论文的发表时间）