X-RAY PUSHING OF A MECHANICAL MICROSWING

摘要：

Propose the mechanism thermally mediated COM displacements to represent a new actuation scheme for NEMS and MEMS.The inverse mechanism may be：MEMS can be used to shape X-ray beams.At energies higher than the Ge K edge the absorbed photons generate fluorescence，CosterKronig and Auger electrons.The absorbed photon flux is calculated for two lever/crystal configurations，for two X-ray beam directions，and for coated and uncoated levers.The use of MEMS as Si single crystal micro-oscillators can provide X-ray choppers at much higher frequencies.Using diffraction，Si single crystal MEMS appear as a good candidate for the high frequency manipulation of X-ray micro beam.

关键词： MEMS NEMS X-ray micro beams microcrystal microlever

作者: Y.Xu S.P.Tang

作者单位: College of Sciences,Hohai University,Nanjing 210098,China School of Sciences,Hebei University of Science and Technology,Shijiazhuang 050018,China

会议类型: 国际会议

会议名称: The 6th International Conference on Applied Electrostatics(第六届国际静电应用会议)

会议地点: 上海

会议语种:英文

页码: 333-336

在线出版日期: 2008-11-03（万方平台首次上网日期，不代表论文的发表时间）