STUDY ON THE ABATEMENT OF CF4 BY ATMOSPHERIC MICROWAVE PLASMA AND EMISSION SPECTROSCOPY
Microwave plasma at atmospheric pressure was investigated experimentally for CF4 decomposition.The mechanism of CF4 decomposition assisting with O2 in plasma was investigated by emission spectra analysis.The results indicated that destruction and removaI efficiencies (DRE) of CF4 increased firstly and then decreased with increasing of O2 concentration.DRE Was up to 83.6％using 0.4kW of microwave power,the initial concentration of CF4 and O2 was 2000ml/m3 and 1000ml/m3，respectively.The results of emission spectra analysis indicated CF4 decomposition was highly depended on the electron collision in plasma，O radicals was the assistance in later reaction，to further oxidize CFi to CO2.For achieving the best DRE of CF4 with O2 as addictive gas，the most important key factor was to have optimum concentration of O2 in inlet gas.More or less O2 concentration was both unsuitable for CF4 decomposition
CF4 decomposition Oxygen Microwave plasma Emission spectroscopy
Xie Hongduan Sun Bing Zhu Xiaomei Liu Yongjun
College of Environmental Science and Engineering,Dalian Maritime University,Post Code:116023,Dalian,China
国际会议
The 6th International Conference on Applied Electrostatics(第六届国际静电应用会议)
上海
英文
127-130
2008-11-03（万方平台首次上网日期，不代表论文的发表时间）