MODELING OF FGM-TFBARS WITH THE METHOD OF REVERBERATION-RAY MATRIX

摘要：

A thin-film bulk acoustic wave resonator(TFBAR)usually consists of a thin-filmpiezoelectric layer and two electrodes,thus forming a layered structure.In this paper,we establish the formulations for wave propagation analysis of piezoelectriclaminates according to the method of reverberation-ray matrix.The inhomogeneityof piezoelectric thin-film,which may be induced during the material fabrication,istaken into consideration,along with the approximate laminate model.Thecorrectness of the method is illustrated through numerical examples,and the effectof material inhomogeneity is discussed.

关键词： Piezoelectric materials Method of reverberation-ray matrix Inhomogeneity

作者: W.Q.Chen Y.Q.Guo

作者单位: Key Laboratory of Soft Soils and Geoenvironmental Engineering,Ministry of Education Department of Civil Engineering,Zhejiang University,Hangzhou 310027,P.R.China

会议类型: 国际会议

会议名称: 第二届国际非均质材料力学会议(The Second International Conference on Heterogeneous Material Mechanics)

会议地点: 安徽黄山

会议语种:英文

页码: 1626-1630

在线出版日期: 2008-06-03（万方平台首次上网日期，不代表论文的发表时间）