NUMERICAL SIMULATION OF INTERFACIAL DELAMINATION OF PZT THIN FILMS BY COHESIVE ZONE MODELS
Previous experimental tests Shang et al.Int.J.Solids Struc.42:1729 show that the multilayered Cr/PZT/PLT/Pt/Ti thin films deposited on single crystal Si substrate delaminated along the interface between PZT and Cr layers in a brittle manner.This study starts from modeling based on cohesive zone concept,and numerical simulations are carried out to check the fracture behavior of this interracial delamination.Two cohesive zone models (CZMs) of exponential type and bilinear type are adopted.The characteristic CZM parameters are extracted through calibration via the experimental results.The simulation results show that the critical stress for interfacial crack nucleation is apparently lower than yield tress of bulk PZT or Cr material and the fracture energy is low,comparing to typical film materials of several mm thicknesses.Our study demonstrated the applicability of CZM for characterizing the interface fracture behavior of μm thick films.
interface cohesive zone model thin film delamination
Yabin Yan Fulin Shang
Department of Engineering Mechanics,School of Aerospace,Xian Jiaotong University,28 West Xianning Road,Xian 710049,China
国际会议
第二届国际非均质材料力学会议(The Second International Conference on Heterogeneous Material Mechanics)
安徽黄山
英文
1451-1454
2008-06-03（万方平台首次上网日期，不代表论文的发表时间）