“Stretchable Silicon Wired Sensor Networks For Smart Materials

摘要：

We present a technique to realize very dense and cost-effective networks of high-performance sensors from monolithic silicon that can be deployed on the centimeter to meter-scale.The two-dimensional network is entirely processed in a semiconductor foundry before it is “stretched to the target size and “cut to the right shape.The stretchability of the monolithic silicon membrane is achieved by micropatterning the silicon such that the maximum local strain remains <2％,well below the yield strain of monocrystaline silicon.Our technique combines the maturity of semiconductor foundry fabrication techniques with the ability to realize a fully interconnected,rugged 2D sensor network of arbitrary size and shape.Because of the small feature sizes of the sensor networks(～100μm)they can be seamlessly integrated into structural materials to realize truly smart materials.

关键词： monolithic sensor networks smart material stretchable silicon structural health monitoring

作者: K. Huang R. Dinyari J.Y. Kim P. Peumans J. Feng G. Lanzara F.K. Chang

作者单位: Electrical Engineering,Stanford University,Stanford,California,U.S.A. Aeronautics and Astronautics,Stanford University,Stanford,California,U.S.A.

会议类型: 国际会议

会议名称: The World Forum on Smart Materials and Smart Structures Technology(SMSST07)(2007年世界智能材料与智能结构技术论坛)

会议地点: 重庆·南京

会议语种:英文

在线出版日期: 2007-05-01（万方平台首次上网日期，不代表论文的发表时间）