Preparation and Magnetic Properties of Sm2Co17 Based Films for MEMS Applications
The Sm2CO17 based films with additives of Fe, Cu, and Zr have been deposited on Si (100) substrates by de magnetron sputtering process. Subsequent thermal treatment and the film thickness are found to have significant contribution to the magnetic properties and magnetization reversal process. It is found that the nucleation model transforms to domain wall phming model to dominate the magnetization reversal process with increasing film thickness at a certain range for the films treated by rapid recurrent thermal annealing (RRTA) method. In special, the 1.8 um thick RRTA-treated film gives rise to large Hc of 5.2 kOe and MR/Ms of 0.8,respectively.
SmCo compounds hard magnetic films coercivity crystallization
L.Peng Q.H.Yang H.W.Zhang Y.Q.Song W.W.Ling S.Li
State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,Sichuan,China
国际会议
The 10th International Conference on Ferrites(2008中国国际铁氧体研讨会)
成都
英文
59-61
2008-10-10（万方平台首次上网日期，不代表论文的发表时间）