The Structure and Magnetic Properties of Mn-Zn Ferrite Films by Alternative Sputtering

摘要：

Mnl-χZnχFe2O4 ferrite films were prepared by alternatively sputtering from two targets with the composition of MnFe204 and ZnFe204, respectively. The films were deposited on (100)Si substrates and the compositions of the film are modulated by controlling the ratio of the sputtering time from each targets. The as-deposited films are amorphous. After being annealed in vacuum furnace at suitable annealing temperature, the polycrystalline Mn-Zn ferrite films are obtained. The film with composition of Mn0.5Zn0.5Fe2O4 show a maximum saturation magnetization Ms. The effects of fabrication conditions on the film structure and magnetic properties were investigated, such as the sputtering oxygen partial pressure, annealing vacuum pressure and temperature, the thickness of the film and etc. The films show higher coercivity than bulk material, the influence of stress on films coercivity was discussed.

关键词： thin film Mn-Zn ferrite alternative sputtering

作者: Z.Y.Liu W.M.Men L.X.Wang J.M.He F.L.Wei

作者单位: Research Institute of Magnetism and Magnetic Materials,Lanzhou University,Lanzhou 730000,Gansu,China Research Institute of Magnetism and Magnetic Materials,Lanzhou University,Lanzhou 730000,Gansu,China

会议类型: 国际会议

会议名称: The 10th International Conference on Ferrites(2008中国国际铁氧体研讨会)

会议地点: 成都

会议语种:英文

页码: 47-50

在线出版日期: 2008-10-10（万方平台首次上网日期，不代表论文的发表时间）