Green micro/nanoimprint process using water-based resins
Micro/nano imprint for polymer patterning is one of the key steps in manufacturing some microelectronics,optoelectronic membranes, microelectromechanical system (MEMS), and biomedical devices. The merits of rapid-forming, simplicity, and low cost for the micro/nanoimprint bring great potential and impact to industries,compared with conventional photolithographic techniques. Generally, the technique using a template or mold with a prefabricated topography to press into a displaceable material that solidifies into the shape of the template pattern at a cooled temperature is called the hot embossing techniques. The process tends to cool the polymer and the template from the high processing temperature to harden the rubbery polymer to a glassy state. The other one, termed UV imprinting, solidifies the material from a mixture of monomers, oligomers and/or initiators to apolymer using UV light irradiation. A lot of literatures have been published for developing the nanoimprint processing and imprinted materials. However, few studies involved the water-based polymer materials, such as natural water-soluble polymers, emulsional polymer solutions, suspended polymer dispersions, and polymeric aqueous solutions. Water-based materials using water as the solvent display a green and environmental-friendly character during coating and imprinting process. Furthermore, some polymers dissolved or dispersed in water display the low viscosity (even in a high solid content of polymer) to be imprinted easily.
Shu-Han Hsu Yi-Chang Chung
Department of Chemical and Materials Engineering,National University of Kaohsiung,Kaohsiung 811,Taiwan R.O.C.
国际会议
5th East-Asian Polymer Conference(第5届东亚高分子学术研讨会)
上海
英文
229-230
2008-06-03（万方平台首次上网日期，不代表论文的发表时间）