Effect of surface roughness on nanoindentation test of thin films
By using the two-dimensional quasicontinuum method, the nanoindentation process on a single crystal copper thin film with surface roughness is simulated to study the effect of surface morphology on the measurements of mechanical parameters. The nanohardness and elastic modulus are calculated according to Oliver-Pharr＇s method. The obtained results show a good agreement with relevant theoretical and experimental results. It is found that surface roughness has a significant influence on both the nanohardness and elastic modulus of thin films determined from nanoindentation tests. The effect of such factors as the indenter size, indentation depth and surface morphology are also examined. To rule out the influence of surface morphology, the indentation depth should be much greater than the characteristic size of surface roughness and a reasonable indenter size should be chosen. This study is helpful for identifying the mechanical parameters of rough thin films by nanoindentation test and designing nanoindentation experiments.
Quasicontinuum method Surface roughness Nanoindentation Nanohardness Thin films
Wu-Gui Jiang Jian-Jun Su Xi-Qiao Feng
FML.Department of Engineering Mechanics.Tsinghua University.Beijing 100084.China;School of Materials School of Materials Science and Engineering,Nanchang Hangkong University,Nanchang 330063,China FML.Department of Engineering Mechanics.Tsinghua University.Beijing 100084.China
国际会议
The Eighth International Conference on Fundamentals of Fracture(ICFF VIII)(第八届断裂基础国际会议)
香港·广州
英文
4965-4972
2008-01-03（万方平台首次上网日期，不代表论文的发表时间）