Micronanofabrication of 3D Polymer Structures by Multiphoton Polymerization
IntroductionIn the past few years, the research on micronanofabrication has been become an attractive interest. Among various techniques, multiphoton polymerization (MPP) has emerged as a powerful tool, which might hold the key to complex 3D structures fabrication with micrometer and/or nanometer scale precision. The spatial fabrication resolution of MPP becomes one of key issues for its application in micronanofabrication. With laser direct writing technique, the spatial resolution is difficult to achieve at nanometer scale due to the diffraction limit. MPP provides the potential to break the diffraction limit. The functionalization of materials is also important in MPP micronanofabrication, which can be expected to provide new functions to 3D microstructures.However, the methodology of functionalization for 3D microstructures has not been seriously developed. In this paper, we report the latest progresses on improvement of MPP resolution, functionalization of materials suited for MPP, and photonic microdevices fabrication.
Xuan-Ming Duan Xian-Zi Dong Wei-Qiang Chen Zhen-Sheng Zhao
Laboratory of Organic NanoPhotonics,Technique Institute of Physics and Chemistry,Chinese Academy of Laboratory of Organic NanoPhotonics,Technique Institute of Physics and Chemistry,Chinese Academy of
国际会议
5th International Symposium on High-Tech Polymer Materials(HTPM-V)(第五届国际高技术高分子材料学术会议)
北京
英文
37-38
2008-10-27（万方平台首次上网日期，不代表论文的发表时间）