RESEARCH OF GAAS TARGET EROSION FACTOR UNDER INFLUENCE OF PULSED POWER ION BEAM

摘要：

In the article the results of research on the coefficient of target erosion made of GaAs at the influence of high-power pulsed ion beam are presented. In the experiments the source of high-power ion beams was used. The beam parameters are the following: ion energy is 250 keV,current density at the target is up to 250 A/cm2, pulse duration is 80 ns. The coefficient of target erosion and its dependence on the number of subsequent pulses were changed. The increase of surface roughness (Rz)parameter at the increase of number of subsequent current beam pulses and the formation of regular structure of surface relief at the pulse number of 20-40 were noticed.

作者: G.E.Remnev M.S.Saltymakov Lie Zeng Feng

作者单位: HVRI at Tomsk Polytechnic University,2a,Lenin ave.,Tomsk,634050,Russia

会议类型: 国际会议

会议名称: 17th International Conference on High-Power Particle Beams(第17届高功率离子束国际会议)

会议地点: 西安

会议语种:英文

页码: 676-678

在线出版日期: 2008-07-06（万方平台首次上网日期，不代表论文的发表时间）