A COMPARISON BEETWEEN MEMS SENSORS AND CONVENTIONAL SENSOR FOR CONDITION MONITORING
Micro-electro mechanical systems (MEMS) sensors, especially MEMS accelerometer and MEMS current sensor, have become habituated for applying in several industrial applications in order to take replace of expensive conventional sensors. In this paper, the performances of one type of the piezoelectric accelerometer and two types of the MEMS accelerometers are investigated and compared to two types of celebrated commercial accelerometer; and performance of one of the MEMS current sensor is compared to two types of commercial current sensors. The investigated MEMS sensors are also used to acquire the vibration signals and current signals in diagnosis of induction motors.
Micro-Electro Mechanical System MEMS Accelerometer MEMS Current Sensor Condition Monitoring Vibration Measurements Current Measurement.
Sung-Do Tae Jong-Duk Son Bo-Suk Yang
School of Mechanical Engineering, Pukyong National University, San 100, Yongdang-dong, Nam-gu, Busan 608-739, South Korea.
国际会议
北京
英文
1479-1487
2008-10-27（万方平台首次上网日期，不代表论文的发表时间）