Design of a Micro Six-Axis Force Sensor Based on Double Layer E-type Membrane

摘要：

The elastic body structure of six-axis force sensor based on the double layer E-type membrane has been used in the normal situation maturely.In this paper,the possibility of the same elastic body structure used in the micro-operation is discussed.The working principle of the sensor structure is introduced firstly,and the static and dynamic characteristics of the elastic body are obtained by finite element analysis.The results demonstrate that six-axis force sensor with this kind of structure can be used in micro-operation and the sensor has high sensitivities, high linearity and almost no static couple in each axis.

关键词： Six-axis force sensor Double layer E-type membrane Finite elements method Elastic body

作者: Weichao Yang Bo Song Yong Yu Yun jian Ge

作者单位: Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei,Anhui Province,China;Dept.of aut Dept.of Mechanical Engineering,Kagoshima University,Kagoshima 890-0065,Japan Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei,Anhui Province,China

会议类型: 国际会议

会议名称: 2008 IEEE International Conference on Onformation and Automation(IEEE 信息与自动化国际会议)

会议地点: 张家界

会议语种:英文

页码: 1632-1636

在线出版日期: 2008-06-20（万方平台首次上网日期，不代表论文的发表时间）