Characteristic Analysis and Simulation for Electrostatic Micro-cantilever

摘要：

Because of its simple structure,IC compatibility, and large force output per unit energy,electrostatic micro- cantilever have been widely used in MEMS actuators.As one of main dynamic characteristics,the hystersis process was precisely characterized and well analysed.Consequently,the application limit was obtained.Under different frequencies harmonic load shock,the mode deformations were changed and brought inaccurate action.The generalized acceleration,generalized displacement,generalized velocity,generalized angular acceleration,generalized angular,generalized angular velocity in six modes were gained in mode analyses.

关键词： Electrostatic micro-cantilever.Hystersis. Harmonic load.Simulation.

作者: Fengli Liu Yongping Hao

作者单位: Department of R&D Center of CAD/CAM technology University of Shenyang Ligong Shenyang,Liaonig Province,China

会议类型: 国际会议

会议名称: 2008 IEEE International Conference on Onformation and Automation(IEEE 信息与自动化国际会议)

会议地点: 张家界

会议语种:英文

页码: 1498-1502

在线出版日期: 2008-06-20（万方平台首次上网日期，不代表论文的发表时间）