On-Line Surface Roughness Measurement Based on Specular Intensity Component of Speckle Patterns

摘要：

The diffraction equations describing the wave propagation from a rough surface to an observation plane are derived.Through the statistical analysis of speckle patterns,an analytical expression relating the rms (root-mean-square) roughness to the speckle contrast is obtained.The limitations of the traditional speckle contrast method used for slightly-rough- surface roughness measurement are discussed.A specular intensity component method (SICM)is proposed as a complement to the speckle contrast method,which overcomes the disadvantages of the speckle contrast techniques.The measuring principle of the SICM is clarified in detail.An experiment is given to illustrate the whole calculation and calibration process, which shows that the SICM can be further developed for on-line measurement in the manufacturing automation industry.

关键词： speckle surface roughness specular intensity component on-line measurement.

作者: Zhao Gao Xuezeng Zhao

作者单位: Department of Electromechanical Control and Automation Harbin Institute of Technology Harbin,Heilongjiang Province,China

会议类型: 国际会议

会议名称: 2008 IEEE International Conference on Onformation and Automation(IEEE 信息与自动化国际会议)

会议地点: 张家界

会议语种:英文

页码: 1050-1055

在线出版日期: 2008-06-20（万方平台首次上网日期，不代表论文的发表时间）