Process and Technology of Rapid Prototyping of A μ-Micro Motor
Purpose The purpose of this paper is to present an advanced process and technology of rapid prototyping of a μ-Micro Motor which is different from the traditional machining and the new manufacturing technology.Design/method/approach The rapid prototyping of a μ-micro motor is a nontraditional machining and an advanced manufacturing technology (AMT) to be realized by using masks. The process and fabrication are going at the same time. For one thing,the μ-micro motor is fabricated by the MEMS process; for another, the structure design must be considered to fabricate or assembly the parts during machining the motor in the meantime, which motor is an end product after finishing machining.Results The research proved that integration of IC process and MEMS using masks are effective in obtaining the rapid prototyping manufacturing of the μ-micro motor. With the mature technique to fabricate the motor, there are advantages to produce the motor in short time.Practical implications The motor is a power source of micro machines to be applied to military and civilian, for example, applied to micro robot, micro bio medicine and micro machine.Originality/value The size of the motor is 190 μm in maximum diameter by 125 μm in height that is bulk machined in array with the number of hundreds of micro motors. The micro motor costs lower.
micro motor nontraditional machining advanced manufacturing technology
Wei Zheng Hui Zheng Rui Liao
Department of Mechanical and Electrical Engineering, School of Physics & Mechanical and Electrical E China Telecom(Xiamen), Fujian 361012, China
国际会议
北京
英文
386-390
2008-11-06（万方平台首次上网日期，不代表论文的发表时间）