CT Reconstruction with Good-Orientation and Layer Separation for Multilayer Objects
Nowadays, multilayer designs such as temperature co-fired ceramic (LTCC) and stacked IC packaging are increasingly popular in electronics and semiconductor industries. For these multilayer structures, X-ray CT is thought as one of the essential tools for inspecting their internal defects. A common requirement for X-ray CT inspection of multilayer objects is to visualize the reconstructed CT results in separated layers so that defect analysis can be conducted layer-wise and conveniently corresponded to manufacturing process. One characteristic of multilayer objects is that the layers are usually thin and have a large area-to-thickness aspect ratio. This property sometimes may lead to failure in inspecting thin defects. For example, thin and large delamination-like defects in a multilayer packaging are in many cases invisible to X-ray 2D imaging. If the user has no prior knowledge about their existence, they are also quit easy to be missed with CT images if the reconstructed object has a tilted orientation. In this paper, we demonstrate that a good-oriented CT reconstruction for planar object can make layer separation much more simple and effective. Through the study of a 5 layer packaging sample, we also show that more detailed information of the delamination-like defects can be observed.
Computed tomography multilayer object layer separation NDT CT.
Tong LIU Brian Stephan WONG Tai Chong CHAI Andrew. A. MALCOLM
Singapore Institute of Manufacturing Technology 71 Nanyang Drive, Singapore 638075 School of MAE, Nanyang Technological Univ, Singapore Institute of Microelectronics, Singapore
国际会议
第十七届世界无损检测会议(17th World Conference on Nondestructive Testing)
上海
英文
15-21
2008-10-25（万方平台首次上网日期，不代表论文的发表时间）