Diamond breakage on CMP pad conditioner

摘要：

Diamond grits may be thermally weakened during the high temperature cycle of brazing. This weakening may exhibit as diamond breakage. During the dressing action, taller diamond grits are more likely to break due to the higher stress present.

关键词： diamond brazing diamond breakage CMP pad conditioner

作者: Liu Ping-Hsiao Sung James C. Hsu Kai-Hung Sung Michae

作者单位: National Taipei University of Technology, Taipei 106, Taiwan National Taipei University of Technology, Taipei 106, Taiwan;KINIK Company, 64, Chung-San Rd., Ying- Advanced Diamond Solutions, Inc., 351 King Street Suite 813, San Francisco, CA 94158, U. S. A.

会议类型: 国际会议

会议名称: 第五届郑州国际超硬材料及制品研讨会

会议地点: 郑州

会议语种:英文

页码: 115-118

在线出版日期: 2008-09-05（万方平台首次上网日期，不代表论文的发表时间）