An Approach to Improve the Precision of the Grating Interferometer Measurement

摘要：

A grating interferometer may be applied to measure the distance of equipment moving. However, some characteristics and process technics of grating interferometer restrict the measurement precision to get improved. Based on an overall review of model and a method of subdivision and thorough analysis of the factors influencing measurement precision, this paper proposes an approach to improve measurement precision: 160 subdivision of MCS51 single chip micro computer. With the application to grating interferometer, this approach is proved to be more feasible and reliable by table-checking.

关键词： grating interferometer subdivision

作者: Shuqiu Li Shufen Liu Liang Xia Wanbo Zheng Xiaoyan Wang

作者单位: College of Computer Science and Technology ,Jilin University, Changchun,China

会议类型: 国际会议

会议名称: The 9th International Conference on Computer-Aided Industrial Design & Conceptual Design(CAID&CD2008)(2008年国际计算机辅助工业设计与概念设计学术会议)

会议地点: 昆明

会议语种:英文

页码: 639-641

在线出版日期: 2008-11-22（万方平台首次上网日期，不代表论文的发表时间）