Ultrasonic Linear Motor using Multilayer Piezoelectric Actuators and Experiment of Precision Positioning Control
This paper presents a new type ultrasonic linear motor with multilayer piezoelectric actuators.To find a solution to overcome the small tensile strength of the multilayer piezoelectric actuators,a special construction using wedges has been developed.This kind of motor can move agilely forward and backward.We measured the ultrasonic linear motors characteristic.Finally,Applying adjusting frequency and phase,and PI controlling strategy,the μm order precision in position was attained.
Ultrasonic motor position control multilayer piezoelectric actuators
Hai Xu Chunsheng Zhao
Mechanical and Electronic Engineering Department,Suzhou Vocational University,Suzhou 215104,China Precision Driving Laboratory,Nanjing University of Aeronautics & Astronautics,Nanjing 210016,China
国际会议
南京
英文
321-325
2007-09-09(万方平台首次上网日期,不代表论文的发表时间)