Study and Test of Double-vibrator Linear Piezoelectric Ultrasonic Motor
This paper introduces a linear ultrasonic motor with double vibrators.The motor consists of two vibrators symmetrically.They use the same bending modes as working modes.The whole motor works in B3 mode.Each vibrator contains four PZT-4 plates.The fixing position of the motor is determined by calculation.The prototype motor was fabricated and tested.When a little pre-pressure is applied and the exciting voltage is 311Vp-p,the maximal velocity with no load is about 704 mm/s.When the voltage is 226 Vp-p and the pre-pressure is 12.69N,the motor offers a driving force of 2.1N.Experiment results show that the motor could be used to drive a precision linear system successfully.
precision linear driving system linear ultrasonic motor double-vibrators
Jinyun Hu Cunyue Lu Yu Chen Tieying Zhou
Department of physics,Tsinghua University,Beijing,100084,China College of Electrical Engineering,Zhejiang University,Hangzhou 310027,China
国际会议
南京
英文
178-183
2007-09-09（万方平台首次上网日期，不代表论文的发表时间）