Surface acoustic wave motors
Surface acoustic waves (SAWs) excited by interdigital transducers (IDTs) deposited on piezoelectric materials have been used for manufacturing acoustic motors including linear and rotary motors,which have the similar characteristics as conventional ultrasonic motors and several additional advantages,such as high operation frequencies,high energy density and easy miniaturization,etc.Recently,several types of non-contact SAW motors have also been developed to improve the operation performances.In addition,the driving mechanisms of the motors were analyzed and discussed.
Shuyi Zhang Liping Cheng
Lab of Modem Acoustics,Institute of Acoustics,Nanjing University,Nanjing 210093,China
国际会议
南京
英文
169-177
2007-09-09(万方平台首次上网日期,不代表论文的发表时间)