Development of a Piezoelectric In-line Pump Using Muitilayer PZT
In forced-liquid cooling systems for high power electronic devices and fuel cell applications,miniaturized precision liquid pump have been demanded for a stable and accurate coolant delivery.Multilayer piezoelectric actuators provide a number of alternatives in the areas of precision liquid pump applications because of their precise,well-controllable displacements,and good force generations.This paper describes a piezoelectric in-line pump using multilayer PZT actuator for forced-liquid cooling applications.The design,fabrication,and performance of the piezoelectric pump are summarized.The overall dimensions of the proposed pump are 18 mm × 18 mm × 20 mm.The fabricated PZT pump achieved no-load flow rate of 7.5 ml/min,maximum output pressure of 111 kPa at the applied sinusoidal voltage of 150 VDC and driving frequency of 1.8 kHz.
piezoelectric in-line pump liquid cooling electronic device multilayer PZT
Young-Bog Ham Woo-Suk Seo Won-Yong Cho Jung-Ho Park So-Nam Yun Byung-Oh Choi
Intelligent and Precision Machinery Research Division,Korea Institute of Machinery & Materials,Daejeon,KOREA
国际会议
南京
英文
156-160
2007-09-09（万方平台首次上网日期，不代表论文的发表时间）