Design and Characteristics Analysis of 2-Dimentionai Optical Scanner Actuated by PZT Bimorph beams

摘要：

The novel scanner with PZT actuator has been designed.PZT bimorph beams are developed in this scanner in order to obtain great actuation force and large scanning angel.The scanner which has been fabricated is able to scan in two directions.The scanning characteristics of the device are analyzed by finite element method and experimental measurement.The measurement results agree with the analyzed values.

关键词： PZT optical scanner bimorph beam

作者: Songmei Yuan Chi Zhuang Qiang Liu

作者单位: School of Mechanical Engineering and Automation,Beihang University,100083 Beijing,P.R.CHINA

会议类型: 国际会议

会议名称: The 4th International Workshop on Piezoelectric Materials and Applications in Actuators(第四届国际压电材料及其在作动器上的应用研讨会)

会议地点: 南京

会议语种:英文

页码: 120-122

在线出版日期: 2007-09-09（万方平台首次上网日期，不代表论文的发表时间）