Computed of Bridge-Type NEMS Series Contact Switch

摘要：

A dielectric-bridge-type MEMS series contact switch is designed, fabricated and measured, which has a moveable membrane with the upper gold electrodes,as well as the contact metal bar,underneath the SiON dielectric bridge.This structure results in electrically isolating bias from the RF signal,simplifying the fabrication process,and decreasing the pull-in voltage to a certain extent.The measured data show the pull-in voltage of 23.3V and the good RF performance of the insertion loss of beyond -1.2dB and the isolation of below -53dB at 0-10GHz,indicating that the witch is suitable for the 0-10GHz applications.

关键词： Bridge-Type contact Switch metal bar gold electrodes RF performance

作者: Guozhu He Jiankang Liu Lan Di

作者单位: Sichuan Agricultural University,Dujiangyan,611830,China School of Information Technology,Jiangnan University,Wuxi,214122,China

会议类型: 国际会议

会议名称: 2008年国际电子商务、工程及科学领域的分布式计算和应用学术研讨会(2008 International Symposium on Distributed Computing and Applications for Business Engineering and Science)

会议地点: 大连

会议语种:英文

页码: 1288-1291

在线出版日期: 2008-07-27（万方平台首次上网日期，不代表论文的发表时间）