An OPC-Friendly Detailed Routing Algorithm

摘要：

The design for manufacturablity brings a huge challenge to semiconductor industry.At present,the advanced IC manufacturers modify the layout file of chip by many resolution enhancement techniques (RETs) to get better lithography images and higher yield.After thoroughly analyzing the present RETs,an improved OPC-friendly detailed routing algorithm is presented.An effective method is introdueed to fast build electric amplitude of diffraction (EAD) table and the table can be rapidly refreshed during maze routing.The detailed routing algorithm is easily integrated into a routing system by simplifying a judgement of critical nets.

关键词： optical proximity correction maze routing design for manufacturability

作者: Mande Xie

作者单位: College of Computer & Information Engineering,Zhejiang gongshang University ,Hangzhou,Zhejiang 310035,China

会议类型: 国际会议

会议名称: 2008年国际电子商务、工程及科学领域的分布式计算和应用学术研讨会(2008 International Symposium on Distributed Computing and Applications for Business Engineering and Science)

会议地点: 大连

会议语种:英文

页码: 747-752

在线出版日期: 2008-07-27（万方平台首次上网日期，不代表论文的发表时间）