A improved muitilayer co-firing piezoelectric ceramics micro-motor
An improved rotary piezoelectric micro-motor is studied in this paper.Different from the conventional traveling wave ultrasonic motor using a monolithic piezoelectric ceramic ring,several multilayer piezoelectric ceramic bulks (1.5mm×3mm×5mm) are obtained by low temperature co-fired technique and used to generate transverse vibration inside the ring type stator.The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the teeth of the stator.The working mode of the prototype motor is simulated by the finite element method,and also measured by the Doppler Laser Vibrometer.It is shown that experimental results are in good agreement with simulation,which verifies the effectiveness of the finite element model.The prototype micro-motor could be driven at the low voltage of 15V under the frequency of 57.6 KHz.
Piezoelectric micro-motor multilayer piezoelectric ceramic co-firing FEM
Ye Ji Xiangcheng Chu Longtu Li Zhilun Gui
State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084 P.R.China
国际会议
南京
英文
203-208
2007-09-09（万方平台首次上网日期，不代表论文的发表时间）