Fundamental flexural vibrations of piezoelectric tubes with mass loads in ultrasonic actuators
The ultrasonic actuators with piezoelectric ceramic tubes have been used in ultrasonic motors, scanning tunneling microscopes (STM) and atomic force microscopes (AFM) recently.In which,high precision micro-positioning technology is essential;which are required to provide the motion in nanometer scales with high accuracy,speed,and load capacity.Actually,improvements of these performances mainly depend on resonance vibrations of the piezoelectric ceramic tubes.In this paper,based on Timoshenko beam model,the fundamental flexural vibration shape of radially polarized piezoelectric ceramic tubes is investigated.Then using Rayleigh energy theory,analytical formulas of the fundamental flexural resonance frequencies are developed.In the paper,particular attentions are devoted to effects of the mass loads at two ends on flexural resonance frequencies.Changing the sizes of the tubes and the mass loads,the variations of the flexural resonance frequencies of the piezoelectric ceramic tubes are calculated theoreticall.To verify accuracy of the analytical formulas,the flexural resonance frequencies for different lengths of the tubes and different mass loads are measured experimentally.The theoretical results agree well with the experimental measurement,which demonstrates that the analytical formulas are accurate for analyzing the flexural resonance frequencies of the piezoelectric ceramic tubes with mass loads at free ends.
ultrasonic actuator flexural resonance frequency Timoshenko beam model
Hui Zhang Shuyi Zhang Zuoqing Wang
Laboratory of Modern Acoustics,Institute of Acoustics,Nanjing University,Nanjing 210093,P.R.China Laboratory of Modern Acoustics,Institute of Acoustics,Nanjing University,Nanjing 210093,P.R.China C Laboratory of Modern Acoustics,Institute of Acoustics,Nanjing University,Nanjing 210093,P.R.China.
国际会议
南京
英文
50-57
2007-09-09（万方平台首次上网日期，不代表论文的发表时间）