Vapor-Lithography

摘要：

This paper introduces a novel method using water vapor to produce micro cupolated wells which shape is not possibly fabricated by conventional photolithography. Countless number of micro-and nano- droplets was collected on substrates and frozen (instead of baked) to produce micro well patterns. Vapor collecting time and hydrophilicity of the substrate were found to be major, determinants to control the size and shape of the micro droplets and so the patterned micro wells. Because we used water vapor for the fabrication, we named this method vapor-lithography. For demonstration, we fabricated a simple device using vapor-lithography and applied it for trapping fibroblasts.

关键词： Vapor-lithography 3D microstructure Micro pattern Cell trapper

作者: Joong Yull Park Chang Mo Hwang Jongil Ju SanHoon Lee

作者单位: Department of Biomedical Engineering, Korea University, Seoul, Korea Korea Artificial Organ Center, Korea University, Seoul, Korea

会议类型: 国际会议

会议名称: The First Shenyang International Colloquium on Micrifluidics(首届沈阳国际微流控学术论坛)

会议地点: 沈阳

会议语种:英文

页码: 124-127

在线出版日期: 2007-10-21（万方平台首次上网日期，不代表论文的发表时间）