Fabrication of Piezoelectrically Driven Micropump with Sol-Gel PZT Films
Piezoelectrically driven micropump using Pb (Zr,Ti)O3 (PZT) film has been successfully fabricated by Sol-Gel techniques. The PZT film with piezoelectric response was used to fabricate V type valve micropump. The key structure of micropump is Si/SiO2/Ti/Au/PZT/Cr/Au film, which is multi-layer driving membrane structure. The questions of PZT film deposited on silicon substrate are solved by the preparation of multi-layer driving membrane. The fabrication of the pump cavity and one-way valve by anisotropic etching are developed and investigated. The SEM photographs of V type valve and XRD analysis for the multi-layer driving membrane are given. The results show that it is successful to fabricate the micropump with MEMS technology. The pump cavity is flat and uniform. The design of V type valve well meets the demand of low power dissipation, minimizing scale and mass batch production, because of the simplicity in structure and small size.
PZT thin films Sol-gel anisotropic etching micropump MEMS
邱成军 曲伟 刘红梅 赵全亮 卜丹 曹茂盛
黑龙江大学集成电路重点实验室,黑龙江,哈尔滨,1500802;北京理工大学材料科学与工程学院,北京,100081 黑龙江大学集成电路重点实验室,黑龙江,哈尔滨,1500802 北京理工大学材料科学与工程学院,北京,100081
国际会议
第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)
杭州
英文
846-849
2007-05-16（万方平台首次上网日期，不代表论文的发表时间）