Effect fo Annealing Temperature on the Ethanol Sensing Properties for the Nanosized TiO2 Thin Films

摘要：

Nanosized TiO2 thin films were prepared by DC magnetron sputtering deposition on alumina tubes and silicon substrates.After deposition, films were annealed in muffle at 500℃, 700℃ and 1100℃, respectively. The relation between sensitivity and annealing temperatures were studied by XRD and gas sensing measurements. Experimental results indicated that the film structure, crystallite size,phase and gas sensing property varied with the annealing condition, and the sensitivity of the anatase phase samples which was annealed at 500℃ was the best with wonderful selectivity and shortest response(recover) time. The best operating temperature was 280℃. The mechanism of the gas sensing properties was discussed.

关键词： TiO2 thin films annealing temperature ethanol-sensing properties sensitivity

作者: 潘国峰 何平 孙以材 高金雍

作者单位: 河北工业大学信息工程学院,天津,300130

会议类型: 国际会议

会议名称: 第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)

会议地点: 杭州

会议语种:英文

页码: 965-968

在线出版日期: 2007-05-16（万方平台首次上网日期，不代表论文的发表时间）