Titanium oxide thin film gas sensors
Solid-state gas sensors based on metal-oxide thin films offer unique advantages such as compatibility with microfabrication processes and stability at high temperatures and under harsh conditions. At the same time, the sensitivity and selectivity of metal oxide sensors should be improved to compete with alternative technologies. This paper describes titanium oxide thin films for gas sensors. Titanium oxide is particularly attractive due to its high dielectric constant, which leads to extended gas-modulated space charge effects well into the film--resulting in high sensitivity, as well as for its compatibility with Si-based microprocessing technologies. The sensing properties of polycrystalline titanium oxide films (~70nm thick) deposited having small grain size (tens of nanometers), are described. A unique technique, using laser-induced melting and solidification of the films, that enables controlling the grain size in thin films will be discussed as a method to study grain size effects on sensing properties of titanium oxide films.
Y Komem G Ankonina A Rothschild J S Im U-J Chung
Department of Materials Engineering, Technion, Haifa, Israel Department of Applied Physics and Applied Mathematics, Columbia University, New York, USA
国际会议
第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)
杭州
英文
157-159
2007-05-16（万方平台首次上网日期，不代表论文的发表时间）