Deposition and sensing properties of PT/PZT/PT thin films for microforce sensors

摘要：

Microforce sensors made of PT/PZT/PT thin films were designed in the micro-Newton range. The PT/PZT/PT thin films were deposited on the Pt/Ti/SiO2/Si substrate by the sol-gel process. Structure and the crystallinity of the deposited films were characterized. The sensing properties of the microforce sensors were measured in static state and in quasi-static state. The sensitivities of the microforce sensors with two different sizes were 0.004 and 0.040 mV/μN-1 in the quasi-static state.

作者: Yan Cui Hanbai Meng Jing Wang Weijie Dong Liding Wang

作者单位: Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, 1160 Key Laboratory for Micro/Nano Technology and System of Liaoning Province, 116023, China School of Electronic and Information Engineering, Dalian University of Technology, 116023, China

会议类型: 国际会议

会议名称: 第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)

会议地点: 杭州

会议语种:英文

页码: 209-212

在线出版日期: 2007-05-16（万方平台首次上网日期，不代表论文的发表时间）