Synthesis and characterization of SnO2: Sb film by dc magnetron sputtering method for applications to transparent electrodes

摘要：

Transparent conducting Sb-doped SnO2 (antimony-doped tin oxide: ATO) films were prepared on Corning glass substrate by dc magnetron sputtering using SnO2 mixed with 6wt.％ of Sb at various substrate temperatures of 100-600℃ and dc powers of 100-200W. All ATO films were deposited with a thickness of 300nm. X-ray defractometer (XRD) measurements showed the ATO films to be crystallized with strong (101) orientation as substrate temperature increases over 300℃. Grain size was calculated from the XRD spectra using the Scherrer equation. The ATO film in this work had a resistivity of order 10-3 and carrier concentration of order 1020.

作者: Sung Uk Lee Won Seok Choi Byungyou Hong

作者单位: School of Information and Communication Engineering, Sungkyunkwan University, Korea Department of Electrical Engineering, Hanbat National University, Korea School of Information and Communication Engineering, Sungkyunkwan University, Korea;Center for Advan

会议类型: 国际会议

会议名称: 第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)

会议地点: 杭州

会议语种:英文

页码: 312-315

在线出版日期: 2007-05-16（万方平台首次上网日期，不代表论文的发表时间）