Theoretical model and optimization of a novel temperature sensor based on quartz tuning fork resonators
To accurately measure temperatures, a novel temperature sensor based on a quartz tuning fork resonator has been designed. The principle of the quartz tuning fork temperature sensor is that the resonant frequency of the quartz resonator changes with the variation in temperature. This type of tuning fork resonator has been designed with a new doubly rotated cut work at flexural vibration mode as temperature sensor. The characteristics of the temperature sensor were evaluated and the results sufficiently met the target of development for temperature sensor. The theoretical model for temperature sensing has been developed and built. The sensor structure was analysed by finite element method (FEM) and optimized, including tuning fork geometry, tine electrode pattern and the sensors elements size. The performance curve of output versus measured temperature is given. The results from theoretical analysis and experiments indicate that the sensors sensitivity can reach 60ppm℃-1 with the measured temperature range varying from 0 to 100℃.
Xu Jun You Bo Li Xin Cui Juan
College of Automation, Harbin University of Science and Technology, Harbin, China, 150080 College of Automation, Harbin University of Science and Technology, Harbin, China,150080
国际会议
第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)
杭州
英文
316-320
2007-05-16（万方平台首次上网日期，不代表论文的发表时间）