Measurement of thin film piezoelectric constants using x-ray diffraction technique
A new method to measure the piezoelectric constants of df33 and df31 of thin films using x-ray diffraction (XRD) is proposed. Piezoelectric constant df33 is calculated from the measurement of change in out-of-plane lattice spacing of the piezoelectric films while piezoelectric constant df31 is obtained from the change in the slope of dφψ versus sin2ψ curves before and after applying an electric field over the film. This method improves the accuracy by directly measuring the strains in the films induced by the externally applied electric field instead of the surface displacement that could easily be interfered with by environment/vibration and surface morphology of the thin films.
Y H Yu M O Lai L Lu
Department of Mechanical Engineering, National University of Singapore, Singapore 117576
国际会议
第二届功能原料国际研讨会(The 2rd International Symposium on Functional Materials)
杭州
英文
353-357
2007-05-16（万方平台首次上网日期，不代表论文的发表时间）