Modeling of an Inductively Coupled Plasma for the Synthesis of Nanoparticles
(0) Nanoparticles show novel properties compared to the bulk material of same chemistry. The small size is responsible for many changes in the thermo-physical properties. Thus, there was an increasing interest in nanomaterials since the past five years. Among other methods, inductively coupled plasma (ICP) torches can be used for the synthesis of nanoparticles. In this process, the precursor material is vaporized in a first step in the plasma core. In a second step, nucleation and condensation occur in the synthesis chamber where the plasma gets colder and form high-purity nanoparticles, the growth of which is stopped by gas quenching. From their low velocity and high temperature, induction plasmas are particularly adapted for this application. Numerical modeling is a good way to achieve a better knowledge and understanding of the process. In the present paper, a two-dimensional model of an inductively coupled plasma torch was developed and validated on the basis of comparisons with data obtained by some other authors. Finally, the current frequency (13.56 MHz), pressure level (400 mbar) and gas flow rates were adjusted for the specific conditions of nanoparticles synthesis.
R. Bolot C. Coddet C. Schreuders M. Leparoux S. Siegmann
LERMPS, University of Technology of Belfort-Montbéliard, FR EMPA – Materials Science and Technology, Thun, CH
国际会议
北京
英文
2007-05-14（万方平台首次上网日期，不代表论文的发表时间）