Preparation and Characterization of LiTa3O8 Thin Films
Novel lithium tantalate (LiTa3O8) thin film was prepared on Pt/Ti/SiO2/Si substrate by sol-gel methods and rapid thermal process. The structure and properties of the prepared LiTa3O8 thin film was investigated by XRD and SEM measurements. The experiment results show that, the structure of LiTa3O8 thin film is similar to orthorhombic and different from LiTaO3 based on XRD spectrum, and the average grain size of LiTa3O8 film is 14.5 nm calculated by using the FWHM data of XRD and the formula of Scherrer. The SEM micrograph reveals the prepared LiTa3O8 film is uniform, smooth and crack-free on the surface for the thickness of 1 μm after crystallization at 750℃. The additions of epoxy into LiTa3O8 sol enhance the adhesiveness between LiTa3O8 thin film and Pt substrate, but bring the particle agglomerated phenomenon in LiTa3O8 film.The crystallization of the sol-gel derived LiTa3O8 film is difficult and the crystallization temperature is more 500C higher than that of LiTaO3 film. The leakage current of the LiTa3O8 film is smaller than that of LiTaO3 film, and the LiTa3O8 film can be subjected to higher breakdown voltage than that of LiTaO3 film. The LiTa3O8 thin film can be used to manufacture the pyroelectric infrared detector with high performance.
characterization infrared detector leakage current LiTa3O8 thin film sol-gel
ZHANG De-Yin HUANG Da-Gui LI Jin-Hua HU Yan DONG Zheng
Sch. of Mechatronics Engineering,Univ. of Electron. Sci. and Tech. of China,Chengdu 610054,P. R. Chi Sch. of Mechatronics Engineering,Univ. of Electron. Sci. and Tech. of China,Chengdu 610054,P. R. Chi Functional Materials Laboratory,Jiangsu Polytechnic Univ.,Changzhou 213016,P. R. China Aviation Engineering Institute,Civil Aviation Flight Univ. Of China,Guanghan 618307,P. R. China
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）