Dielectric and pyroelectric properties of compositionally graded Pb(Zr1-xTix)O3 thin films prepared by sol-gel process
Compositionally graded ferroelectric lead zirconate titanate Pb(Zr1-xTix)O3 (PZT) thin films were grown on Pt/Ti/SiO2/Si substrates by using a sol-gel process. The final structure consists of six layers, up-graded graded films starting from PbZrO3 on the Pt electrode to the top PZT(50) layer, it consists of (1) no Ti; (2) 10％ Ti; (3) 20％ Ti; (4) 30％ Ti; (5) 40 ％ Ti; and 50 ％ Ti. Whereas films with opposite gradient are called down-graded graded films. Structure and dielectric properties of the graded films was investigated by X-ray diffraction, Auger electron spectroscopy and by impedance analysis. The up-graded and down-graded PZT films annealed at 600μC, exhibited the remanent polarization values of 18.0 and 24.2 μC/cm2, respectively. The typical small signal dielectric constants and loss tand at a frequency of 100 Hz were 523 and 0.018, 544 and 0.020, respectively, for up-graded and down-graded PZT thin films. The temperature dependence of pyroelectric coefficients of the graded PZT films was measured by a dynamic technique. From 20 to 82 ℃, the pyroelectric coefficients of the up-graded and down-graded PZT films up to 374 and 407μC/m2K, respectively.
Graded films Pb(Zr Ti)O3 Dielectric properties Pyroelectric properties
唐新桂 蒋力立 匡淑娟 丁爱丽 陈王丽华
广东工业大学物理与光电工程学院,广州市大学城,广州510006 东工业大学实验教学中心,广州市大学城,广州510006 中国科学院上海硅酸盐研究所,上海200050 香港理工大学应用物理系,香港红堪,九龙
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）