Studies of Preparation and Ferroelectric Properties of PZT thin films by Nebulized Spray Pyrolysis Method
PZT thin films were prepared by the nebulized spray pyrolysis method. Annealing temperature was confirmed by TGA and DTA analyses of heat-treatment. The structural properties of the PZT films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The ferroelectrics characteristics were investigated by the capacitance-voltage(C-V) technique. However, those results were different from the results obtained by Sawyer-Tower Bridge. The two C-V curves, sweeping up and down, were not symmetric. By the measurement of Sawyer-Tower Bridge, it was found that the ferroelectrics properties depended on the measurement frequency, such as a thinner hysteresis loop, lower Ec and Pr, shift of the center of hysteresis loop, and worse symmetry.
PZT Thin film Ferroelectrics properties
武光明 朱江 邢光建 吕爱君
北京石油化工学院 北京 102617
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）