CMP Study of NiP Substrate of Computer Hard-disk with Alkali Nanometer Slurry

摘要：

In this paper, the chemical character of NiP substrate of computer disk is analyzed. New type of alkali slurry for NiP substrate was prepared for CMP NiP substrate. The CMP experiments were accomplished with alkali slurry and acid slurry, by comparition, the planarization, the uniformity and the roughness were all improved.

关键词： Hard-disk Substrate CMP Alkali slurry Roughness Planarization

作者: 刘玉岭 田军 唐文栋 张国玲 王立发

作者单位: 河北工业大学微电子技术与材料研究所,天津,300130

会议类型: 国际会议

会议名称: 第六届中国国际纳米科技研讨会

会议地点: 成都

会议语种:英文

在线出版日期: 2007-11-19（万方平台首次上网日期，不代表论文的发表时间）